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產(chǎn)品名稱(chēng): Edwards STP 451磁懸浮渦輪泵
產(chǎn)品型號(hào): B74841010
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無(wú)相關(guān)文檔
簡(jiǎn)單介紹
Edwards STP 451磁懸浮渦輪泵
的詳細(xì)介紹
Edwards STP 451 Turbomolecular Vacuum Pump - NEW
Edwards high performance STPH301C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH301C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
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Higher gas throughput
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Maximized process flexibility
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Oil free
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Low vibration
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High reliability
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Maintenance free
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Harsh process compatible
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Increased life
Advanced Controller Design
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Auto tuning
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Self diagnostic functions
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DC motor drive
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Battery-free operation
Compact Design
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Small footprint
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Half rack controller
5 Axis Magnetic Suspension System
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Zero contamination
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Low maintenance
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Any orientation operation
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Inlet flange
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ISO160
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Outlet port
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KF25
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Pumping Speed
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|
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N2
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440 l s-1
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H2
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275 l s-1
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Compression ratio
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N2
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>108
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H2
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>2 x 104
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Ultimate pressure
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10-7 Pa (10-9 Torr)
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Maximum allowable inlet pressure
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|
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Ambient cooled
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0.066 Pa (5 x 10-4 Torr)
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Maximum continuous outlet pressure
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|
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Ambient cooled
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13 Pa (0.1 Torr)
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Rated speed
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48000 rpm
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Starting time
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3 min
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Maximum inlet flange temperature
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120 °C
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Input voltage
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100 to 120 V a.c. (± 10) or
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|
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200 to 240 V a.c. (± 10)
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Power consumption
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|
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Start up
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0.55 kVA
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Weight
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|
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Pump
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12 kg
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Controller
|
7 kg
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|
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