Edwards STPH 301C Turbomolecular Vacuum Pump - NEW Edwards high performance STPH301C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH301C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries. Advanced Rotor Technology Higher gas throughput Maximized process flexibility Oil free Low vibration High reliability Maintenance free Harsh process compatible Increased life Advanced Controller Design Auto tuning Self diagnostic functions DC motor drive Battery-free operation Compact Design Small footprint Half rack controller 5 Axis Magnetic Suspension System Zero contamination Low maintenance Any orientation operation Inlet flange ISO-100K Outlet port KF-40 Purge port KF-10 Water cooling fitting PT1/4 Pumping speed N2 300 l/s H2 200 l/s Compression ratio N2 > 108 H2 103 Ultimate pressure w/ bake out heating 10-7 Pa (10-9 Torr) Max. continuous outlet pressure 665 Pa (5 Torr) Max. nitrogen throughput 2,500 sccm Rated speed 48,000 rpm Starting time 4 min Max inlet flange temperature 120°C Input voltage 100 to 120 Power consumption 0.6 kVA Weight 15 kg Edwards STPH301C Turbomolecular Vacuum Pump - NEW P/N B719-01-010 / B71901010 STPH301C ISO-100K P/N YT34-0Z-004 / YT340Z004 STPH301C DN 100 CF P/N YT34-16-001 / YT3416001 STPH301CV ISO-100F TMS
Edwards STPH 301C Turbomolecular Vacuum Pump - NEW
Edwards high performance STPH301C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH301C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
Advanced Controller Design
Compact Design
5 Axis Magnetic Suspension System
Edwards STPH301C Turbomolecular Vacuum Pump - NEW P/N B719-01-010 / B71901010 STPH301C ISO-100K P/N YT34-0Z-004 / YT340Z004 STPH301C DN 100 CF P/N YT34-16-001 / YT3416001 STPH301CV ISO-100F TMS
滬公網(wǎng)安備 31011702004251號
