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產(chǎn)品名稱: Edwards iXL120N干式真空泵
產(chǎn)品型號(hào): A54114410
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無相關(guān)文檔
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Edwards iXL120N干式真空泵現(xiàn)貨供應(yīng)
Edwards iXL120N干式真空泵
的詳細(xì)介紹
Edwards iXL120N Semiconductor Dry Vacuum Pump - NEW
The iXL120 is a low energy, compact dry pump system that can be mounted on tool or remotely. It is designed to give extremely low cost of ownership. The iXL120 is intended only for use on clean duty applications. The iXL120 is not intended for use with potentially flammable, corrosive, toxic or other hazardous gases since these gases or oxygen can mix within the pump system.
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Typical peak pumping speed (no gas purge/cold pump)
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110 m3/h-1 / 65 cfm
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Ultimate pressure
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0.01 mbar / 8 mTorr
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Pump inlet flange
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ISO-63 / NW50
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Exhaust gas outlet
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NW25
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Intended use
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Indoor use
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Operating ambient temperature range
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5 to 40°C
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Storage ambient temperature range
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-45 to 55°C
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Maximum relative humidity
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80% for temperatures up to 31°C decreasing linearly to 50% relative humidity at 40°C
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Maximum operating altitude
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up to 2,000 m
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Pollution degree
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II (IEC 61010) (Normally only non-conductive pollution occurs. Occasionally, however, temporary conductivity caused by condensation must be expected)
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Atmosphere
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Non flammable and non-corrosive
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Degree of protection provided by enclosure
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IP31D (EN60529: Degrees of protection provided by enclosures)
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Dimensions
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450 x 230 x 275 mm
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Mass
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59 kg
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Noise level (at ultimate)
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< 55 dB(A)
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Vibration level at inlet
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< 1.5 mm s-1
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Vibration to the floor (when docked)
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< 0.05 mm s-1
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Initial force to push the pump
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0.06 kN
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Sustained force to push the pump
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0.04 kN
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Warm up time to nominal pumping performance
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45 min
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Edwards MODEL iXL120N Semiconductor Dry Vacuum Pump - NEW
CODE No A541-14-010 / A54114010 iXL120N E 200-460V 3/8 QC Water Fittings
CODE No A541-14-020 / A54114020 iXL120N E 200-460V 1/4 QC Water Fittings
CODE No A541-14-210 / A54114210 iXL120N E 200-460V SPI TIM 3/8 QC Water Fittings
A541-14-410 / A54114410 iXL120N E 200-460V TEL 3/8 QC Water Fittings
A541-14-011 / A54114011 iXL120N E 200-460V 3/8 QC Water Fittings Flow Cont Valve
A541-14-411 / A54114411 iXL120N E 200-460V TEL 3/8 QC Water Fittings Flow Cont Valve
