Edwards iH1000半導(dǎo)體真空泵
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產(chǎn)品名稱: Edwards iH1000半導(dǎo)體真空泵
產(chǎn)品型號(hào): A59030908
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無(wú)相關(guān)文檔
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Edwards iH1000半導(dǎo)體真空泵
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Edwards iH1000
Edwards iH1000 Semiconductor Dry Vacuum Pump - NEW
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
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Peak speed
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1,000 m3h-1
589 cfm
16,670 lmin-1
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Ultimate vacuum
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1 x 10-3 mbar
7.5 x 10-4 Torr
0.1 Pa
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Typical shaft seal nitrogen flow
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4 slm
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Inlet connection
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ISO100
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Outlet connection
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NW40
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Typical cooling water flow at 15 psi pressure drop
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240 lh-1
4 lmin-1
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Weight
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430 kg
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Power input at ultimate
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3.8 kW
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Rated motor power
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6.1 kW
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Oil capacity
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1.48 l
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All figures are typical without gas ballast.
Edwards iH1000 Semiconductor Dry Vacuum Pump - NEW
A59030908 / A590-30-908 iH1000 460V 60Hz three-phase
A59030945 / A590-30-945 iH1000 200/208V 50/60Hz 3-phase
A59030946 / A590-30-946 iH1000 380/415V 50Hz 3-phase
A59030957 / A590-30-957 iH1000 230V 60Hz 3-phase
