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產(chǎn)品名稱: Edwards EPX500NE干式真空泵
產(chǎn)品型號(hào): A41954012
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無(wú)相關(guān)文檔
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Edwards EPX500NE干式真空泵
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Edwards EPX500NE 208V Semiconductor Dry Vacuum Pump - NEW
A41954012 / A41954012 EPX500NE 208V No TIM 3/8 water connector
A41954014 / A41954014 EPX500NE 400V No TIM 3/8 water connector
A41954022 / A41954022 EPX500NE 208V No TIM 1/4 water connector
A41954212 / A41954212 EPX500NE 208V SPI TIM 3/8 water connector
A41954224 / A41954224 EPX500NE 400V SPI TIM 1/4 water connectors
A41954412 / A41954412 EPX500NE 208V TEL TIM 3/8 water connector
A41954414 / A41954414 EPX500NE 400V TEL TIM 3/8 water connectors
A41954424 / A41954424 EPX500NE 400V TEL TIM 1/4 water connectors
A41954512 / A41954512 EPX500NE 208V LAM TIM 3/8 water connector
A41954712 / A41954712 EPX500NE 208V MCM TIM 3/8 water connector
A41954714 / A41954714 EPX500NE 400V MCM TIM 3/8 water connectors
Edwards EPX500NE 208V Semiconductor Dry Vacuum Pump - NEW
The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of < 7 x 10-5 Torr. Based on the successful award winning IPX range, the modular EPX500 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX. The EPX NE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring.
Peak Speed500 m3h-1 / 295 ft3min-1 / 8,338 lmin-1Ultimate Vacuum< 1 x 10-6 mbar / < 7 x 10-7 Torr / < 1 x 10-4 PaWarm up time (to nominal performance) 30 minInlet FlangeISO160Outlet flangeNW25Noise< 59 dB(A)Minimum cooling water flow rate2 lmin-1Cooling water temperature15 - 35°CNitrogen supply interface1/4 in (6.5 mm) tubeNitrogen supply pressure3 x 105 - 7 x 105 paMinimum nitrogen purity99.95%Electrical supply200/208 V, 50/60 Hz 3-phasePower at ultimate1.4 kWRated motor power3.0 kWTIMNoneWeight45.2 kg
